Integrated cost and productivity learning in CMOS semiconductor manufacturing
نویسندگان
چکیده
This paper describes a cost and productivity learning process that was carried out on a large-capacity CIMOS manufacturing line at the IBIM Burlington facility from 1991 to 1993. Major productivity gains were realized through process and tool improvements affecting yield, and through work-in-progress optimization and scrap reduction. Significant cost learning was also accomplished through tool cost management, capital depreciation and space cost reductions, and manpower optimization.
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ورودعنوان ژورنال:
- IBM Journal of Research and Development
دوره 39 شماره
صفحات -
تاریخ انتشار 1995