Integrated cost and productivity learning in CMOS semiconductor manufacturing

This paper describes a cost and productivity learning process that was carried out on a large-capacity CIMOS manufacturing line at the IBIM Burlington facility from 1991 to 1993. Major productivity gains were realized through process and tool improvements affecting yield, and through work-in-progress optimization and scrap reduction. Significant cost learning was also accomplished through tool cost management, capital depreciation and space cost reductions, and manpower optimization.